Nanoelectromechanical systems (NEMS) aim to explore the behavior and performance of mechanical devices in the nanometer regime. By reducing device dimensions, these systems demonstrate increased resonance frequencies and lower bending stiffness, thereby improving force and mass sensitivity.
Graphene, the thinnest, stiffest, and strongest material known to date, has great potential for NEMS applications. Moreover, graphene is remarkably versatile in its processability. It can be grown over large areas, transferred onto arbitrary substrates and patterned by standard photolithography processes. However, the fabrication of suspended graphene membrane devices with minimal contamination and high yield over large areas remains a challenging issue.
In this work we present a fabrication method that allows the construction of arrays of micrometer scale suspended graphene membranes over entire wafers. Furthermore, by either applying an electric field or a differential pressure across these suspended structures, whilst taking AFM measurements, we can study the e electromechanical characteristics of graphene-NEMS devices.